Material Removal Mechanism and Evolution of Subsurface Defects during Nanocutting of Monocrystalline Cu

Table 1

The cutting variables and assigned parameters corresponding to 2.5D simulations of monocrystalline Cu.

Module	Simulation group	R (nm)	γ (°)	(m/s)	Tool atoms
A	No. 1	30	0	200	68966
	No. 2	30	−15	200	96362
B	No. 3	10	0	150	55697
	No. 4	20	0	150	70663
	No. 5	30	0	150	68966
C	No. 6	20	0	150	70663
	No. 7	20	0	200	70663
	No. 8	20	0	250	70663