Research Article
An Unconventional Inchworm Actuator Based on PZT/ERFs Control Technology
Table 1
Detailed working process of a working cycle of the stepping actuator.
| | Number | Valve 1 | Valve 2 | PZT stack pump | Hydraulic cylinder | | Volume of chamber | Working state |
| | 1 | Close (on) | Open (off) | | No working (off) | Stop | | 2 | Close (on) | Open (off) | ā | Expelling (on) | Move a step | | 3 | Close (on) | Close (on) | | Stop expelling (on) | Stop | | 4 | Open (off) | Close (on) | | Stop expelling (on) | Stop | | 5 | Open (off) | Close (on) | ā | Sucking (off) | Stop | | 6 | Close (on) | Close (on) | | Stop sucking (off) | Stop |
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