Research Article

An Unconventional Inchworm Actuator Based on PZT/ERFs Control Technology

Table 2

PZT stack technology parameters (from Piezomechanik (PZ)).

Model number PST 150/5/100

Length 105 (mm)

Nominal displacement100 (μm)

Maximum output force800 (N)

Rigidity8 (N/μm)

Static capacity2.4 (μF)