Research Article

Peculiarities of Integrating Mechanical Valves in Microfluidic Channels Using Direct Laser Writing

Figure 3

(a) 3D model of the valve used for fabrication. (b) and (c) Optical image and SEM micrograph of valve on the glass substrate. No deviations from the planned geometry can be detected. (d) 3D model of the valve inside the channel. (e) Integrated polymeric 3D valve inside the glass channel.