MEMS Dynamic Characteristics Analysis of Electrostatic Microbeams for Building Structure Monitoring

Table 1

Multilayer microbeam parameters.

Type	Symbol	Data
Length	L	600
Width		40
Thickness	H	2.4
Young modulus	E	150 GPa
Air viscosity	U	1.82 10−5 kg/(m s)
Residual stress	S	−3.7 MPa
Density		2330 kg/m^3
Air pressure	P0	1.013 105 pa