Investigation of Structural and Optical Properties of ZnO Thin Films Grown on Different Substrates by Mist-CVD Enhanced with Ozone Gas Produced by Corona Discharge Plasma

Table 2

Structural and vibrational properties of ZnO thin films.

Samples	Interplanar spacing d (nm)	Lattice parameter c (nm)	Crystallite size (nm)	Strain (εzz)	RMS (nm)	E2(L) (cm^−1)	E2(H) (cm^−1)
A	0.2588	0.5176	29.58	−0.0045	43.6	—	428
B	0.2596	0.5193	36.87	−0.0012	37.3	97	435
C	0.2599	0.5199	46.71	−0.0006	15.3	99	437