Deposition and Tribological Properties of Sulfur-Doped DLC Films Deposited by PBII Method

Figure 5

Wear scar micrographs on SUS440C balls with C/S flow-rate ratio of (a) 1 : 2 and (b) 2 : 1 at bias voltage of −5 kV under ambient air.

(a) C/S = 1 : 2, FC = 0.05 at 6000 cycles

(b) C/S = 2 : 1, FC = 0.13 at 6000 cycles