Study of Large-Scale Aluminium-Doped Zinc Oxide Ceramic Targets Prepared by Slip Casting

Figure 4

SEM micrographs of AZO targets sintered at (a) 1380°C, (b) 1400°C, (c) 1420°C, and (d) 1460°C.

(a) 1380°C

(b) 1400°C

(c) 1420°C

(d) 1460°C