Rapid Melt Growth of Single Crystal InGaAs on Si Substrates

Figure 1

(a) SEM image of RMG InGaAs. Dark regions in the white circle are Si islands. (b) EBSD image of the crystal orientation. (c) EDS map for As element of the same InGaAs stripe. (d) EDS map for Ga element of the same InGaAs stripe. (e) EDS map for In element of the same InGaAs stripe. (f) Misorientation distribution of the InGaAs stripe.

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