Research Article
Influence of Elements on the Corrosion Resistance of DLC Films
Table 3
Relative atomic content and mechanical properties of all films.
| | Film type | Gaseous mixture | Gas flow rate ratio | Relative atomic content (at.%) | Estimated content (at.%) | Mechanical properties | | C | Si | O | N | Si | Hardness (GPa) | Elastic modulus (GPa) |
| | Pure DLC | C2H2 | — | 84.0 | 16.0 | — | — | — | 15.9 | 142.3 |
| | Si-DLC | C2H2 : TMS | 2 : 1 | 67.0 | 31.0 | 2.0 | — | 15 | 13.9 | 130.8 | | 1 : 4 | 57.5 | 40.0 | 2.5 | — | 24 | 14.4 | 133.5 |
| | Si-N-DLC | C2H2 : TMS : N2 | 14 : 1 : 1 | 79.3 | 19.3 | 0.40 | 1.0 | 3.3 | 13.7 | 129.3 | | 14 : 1 : 2 | 78.0 | 19.6 | 0.90 | 1.5 | 3.6 | 13.3 | 127.5 | | 14 : 1 : 3 | 76.9 | 20.2 | 0.90 | 2.0 | 4.2 | 13.0 | 124.4 |
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