Computer Simulation of Metal Ions Transport to Uneven Substrates during Ionized Plasma Vapour Deposition

Table 2

Parameters and results of global model.

Parameter	Values
	cm^−3
	400 K
	5.3 Pa (40 mTorr)
RF	100 W	400 W	700 W	1000 W
	cm^−3	cm^−3	cm^−3	cm^−3
	1.47 eV	1.46 eV	1.44 eV	1.42 eV
	cm^−3	cm^−3	cm^−3	cm^−3
	cm^−3	cm^−3	cm^−3	cm^−3

of particle model; parameter; from [23]; of global model.