Experiment and Prediction of Ablation Depth in Excimer Laser Micromachining of Optical Polymer Waveguides

Table 3

Comparison of experimental and predicted mean depths and their relative errors.

Experiment	Experimental mean depth (μm)	Predicted mean depth (μm)	% relative error (gbellmf)
1	0.678	0.702	3.496
2	1.65	1.651	0.055
3	2.49	2.474	0.655
4	3.12	3.184	2.035
5	4.04	3.979	1.505
6	5.15	4.741	7.934
7	5.53	5.437	1.689
8	6.2	6.139	0.981
9	6.61	6.782	2.604
10	7.63	7.442	2.461
11	8.5	8.752	2.964
12	10.4	10.168	2.234
13	11.4	11.721	2.818
14	13.1	13.333	1.779
15	14.5	14.914	2.852
16	17	16.398	3.544
17	17.5	17.740	1.372
18	18.9	18.976	0.404
19	20.2	20.142	0.287
20	21	21.250	1.190
21	0.173	0.174	0.405
22	0.425	0.428	0.612
23	0.695	0.691	0.576
24	0.988	0.988	0.040
25	1.35	1.356	0.437
26	1.66	1.652	0.494
27	1.82	1.851	1.720
28	2.04	2.017	1.132
29	2.17	2.184	0.641
30	2.36	2.350	0.415
31	2.43	2.348	3.370
32	3.1	3.164	2.068
33	3.42	3.980	16.371
34	7.58	7.556	0.322
35	8.47	8.489	0.218
36	0.967	0.967	0.000

Mean relative error = 1.991.