Research Article
Experimental Study of the Ultrasonic Vibration-Assisted Abrasive Waterjet Micromachining the Quartz Glass
Table 1
The value of the experimental parameters.
| | System pressure (MPa) | Nozzle diameter (mm) | Distance (mm) | Abrasive supply rate (mg/s) | Ultrasonic frequency (kHz) | Amplitude of ultrasonic vibration (µm) | Abrasive | Abrasive mesh (#) |
| | 5–25 | 1 | 3–7 | 2.5 | 20 | 10, 20, and 30 | SiC | 280, 320, and 400 |
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