Research Article
Design and Analysis of a Novel Piezo-Actuated XYθz Micropositioning Mechanism with Large Travel and Kinematic Decoupling
Figure 13
Dependence of the angle travel θz on the design parameters: (a) la; (b) lo; (c) R; (d) x.
| (a) |
| (b) |
| (c) |
| (d) |