Microstructure and Properties of TiSiN/AlN with Different Modulation Periods

Figure 7

Morphology of TiSiN/AlN nanomultilayers. (a) Thickness of the AlN layer is 1 nm. (b) Thickness of the AlN layer is 1.5 nm. (c) Thickness of the AlN layer is 2 nm. (d) Thickness of the AlN layer is 2.5 nm. (e) Thickness of the AlN layer is 3 nm.

(a)

(b)

(c)

(d)

(e)