Microstructure and Properties of TiSiN/AlN with Different Modulation Periods

Table 1

Modulation periods of TiSiN/AlN nanomultilayers.

No.	tTiSiN (s)	tAlN (s)	lTiSiN (nm)	lAlN (nm)	Modulation period (nm)	Number of bilayers	Total thickness (μm)
1	21.7	7.5	1	1	2	600	1.2
2	21.7	11.19	1	1.5	2.5	500	1.25
3	21.7	14.9	1	2	3	400	1.2
4	21.7	18.65	1	2.5	3.5	350	1.225
5	21.7	22.4	1	3	4	300	1.2