Elements-Added Diamond-Like Carbon Film for Biomedical Applications

Table 1

Deposition of pure DLC, Si-DLC, and Si-N-DLC films.

Film type	Gaseous mixture	Bias voltage (kV)	RF power (W)	Deposition pressure (Pa)	Gas flow rate ratio	Actual gas flow (sccm)
Pure DLC	C2H2	−5	300	2	—	17
Si-DLC	C2H2 : TMS	−5	300	2	1 : 2	5.5 : 11.0
					1 : 4	3.2 : 12.8
					1 : 6	2.5 : 15.0
Si-N-DLC	C2H2 : TMS : N2	−5	300	2–2.5	14 : 1 : 2	14 : 1 : 2
					14 : 1 : 4	14 : 1 : 4
					14 : 1 : 6	14 : 1 : 6