Elements-Added Diamond-Like Carbon Film for Biomedical Applications

Table 2

G peak and ID/IG ratio of pure DLC, Si-DLC, and Si-N-DLC films.

Film type	Gaseous mixture	Gas flow rate ratio	G peak (cm^−1)	ID/IG
Pure DLC	C2H2	—	1,540	0.59
Si-DLC	C2H2 : TMS	1 : 2	1,467	0.15
		1 : 4	1,462	0.12
		1 : 6	1,456	0.11
Si-N-DLC	C2H2 : TMS : N2	14 : 1 : 2	1,521	0.55
		14 : 1 : 4	1,520	0.56
		14 : 1 : 6	1,524	0.58