Elements-Added Diamond-Like Carbon Film for Biomedical Applications

Table 3

Relative atomic content and average roughness of pure DLC, Si-DLC, and Si-N-DLC films.

Film type	Gaseous mixture	Gas flow rate ratio	Relative atomic content (at.%)					Average roughness (Ra; µm)
			C	Si	N	O	Fe
Uncoated AISI 316 L	—	—	5.9	0.8	—	3.6	61.7	0.18
Pure DLC	C2H2	—	91.1	0.1	—	0.3	5.8	0.13
Si-DLC	C2H2 : TMS	1 : 2	62.7	13.3	—	2.7	14.4	0.08
		1 : 4	59.1	13.7	—	3.1	17.1	0.07
		1 : 6	58.1	14.2	—	2.8	16.9	0.08
Si-N-DLC	C2H2 : TMS : N2	14 : 1 : 2	86.3	2.8	0.2	0.7	6.9	0.08
		14 : 1 : 4	77.9	1.7	0.5	1.9	12.3	0.07
		14 : 1 : 6	81.6	1.9	1.0	1.2	9.8	0.10