Elements-Added Diamond-Like Carbon Film for Biomedical Applications

Table 4

Mechanical properties and friction coefficient of pure DLC, Si-DLC, and Si-N-DLC films.

Film type	Gas flow rate ratio	Mechanical properties		Friction coefficient
		Hardness (GPa)	Elastic modulus (GPa)
Uncoated AISI316L	—	—	—	1.09
Pure DLC	—	25.46	184.51	0.17
Si-DLC	1 : 2	29.16	209.76	0.22
	1 : 4	31.15	216.92	0.21
	1 : 6	26.05	185.85	0.30
Si-N-DLC	14 : 1 : 2	30.50	212.16	0.17
	14 : 1 : 4	34.05	220.97	0.13
	14 : 1 : 6	26.28	185.61	0.15