Mathematical Modelling of RF Plasma Flow at Low Pressures with 3D Electromagnetic Field

<div>The distribution of the electron density in the ICRF plasma flow in longitudinal cross section (left side) and distributions of electron (red curve) and ion (black curve) densities along the flow axis (right side).</div>

Advances in Materials Science and Engineering

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Figure 2

Figure 2: Mathematical Modelling of RF Plasma Flow at Low Pressures with 3D Electromagnetic Field 