Research Article
[Retracted] Fabrication of Hollow Needle Tips with Nanoholes by Plasma Maskless Processing and Calculation and Detection of Complex Surface Edges
Table 2
Ni film stripping process parameters and thickness.
| Sputtering power(w) | 120 | 100 | 0 | 80 | 0 | 0 | 0 | 0 |
| Sputtering time (min) | 30 | 40 | 60 | 40 | 50 | 60 | 80 | 99 | Film thickness (nm) | 90 | 130 | 160 | 90 | 130 | 140 | 200 | 230 | Ultrasonic wash time (s) | Not stripped | 20 | Partly stripped | 10 | 20 | 60 | 30 | 10 |
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