Research Article

[Retracted] Fabrication of Hollow Needle Tips with Nanoholes by Plasma Maskless Processing and Calculation and Detection of Complex Surface Edges

Table 4

SF6 breakdown discharge parameters.

GasQuality scorePD (pa.cm)P (kPa)/100 µm

2273153.315.3
2825189.38.93
3641480.08
4442068.06.8
6445744.04.4
146513303
Ar4013712012