Classification of Silicon (Si) Wafer Material Defects in Semiconductor Choosers using a Deep Learning ShuffleNet-v2-CNN Model

Table 1

Architecture details of convolutional autoencoder.

Layer	Output	Parameters
Input_1	(None, 26, 26, 3)	0
Conv2d_1	(None, 26, 26, 64)	1792
MaxPooling2d_1	(None, 13, 13, 64)	0
Conv2dTrasnpose_1	(None, 13, 13, 64)	36928
Upsampling2d_1	(None, 26, 26, 64)	0
Conv2dTranspose_2	(None, 26, 26, 3)	1731