Classification of Silicon (Si) Wafer Material Defects in Semiconductor Choosers using a Deep Learning ShuffleNet-v2-CNN Model

Table 2

Architecture of ShuffleNet-v2 [22].

Layer	Output Size	Kernel Size	Stride	Repeat	Output Channels
Image	224 × 224				3
Conv1	112 × 112	3 × 3	2	1	24
MaxPool	56 × 56	3 × 3	2
Stage2	28 × 28		2	1	116
	28 × 28		1	3
Stage3	14 × 14		2	1	232
	14 × 14		1	7
Stage4	7 × 7		2	1	464
	7 × 7		1	3
Conv5	7 × 7	1 × 1	1	1	1024
GlobalPool	1 × 1	7 × 7
FC					1000