Classification of Silicon (Si) Wafer Material Defects in Semiconductor Choosers using a Deep Learning ShuffleNet-v2-CNN Model

Table 4

Comparison analysis of performances.

Models	Accuracy	Precision	Recall	F1-Score
DCNN	91.20	90.33	90.89	89.81
CNN-kNN	93.52	92.76	93.02	92.98
CNN-FRCNN	95.67	94.24	95.18	94.82
CNN-Inception	95.16	93.92	94.66	94.47
Proposed	96.93	95.40	96.26	95.75