Research Article

Effect of Ti-Based Thin Solid Films on Tribological and Mechanical Properties of AL7075-T7351

Table 4

Experimental parameters of DC magnetron sputtering.

Deposition conditionDC magnetron sputtering

Target materialTitanium
Base pressure (Torr)
Working pressure (Torr)2.0
Pressure gasArgon
Power (W)100, 300
Deposition time (min)30, 90
TemperatureRT