Research Article
Effect of Ti-Based Thin Solid Films on Tribological and Mechanical Properties of AL7075-T7351
Table 4
Experimental parameters of DC magnetron sputtering.
| Deposition condition | DC magnetron sputtering |
| Target material | Titanium | Base pressure (Torr) | | Working pressure (Torr) | 2.0 | Pressure gas | Argon | Power (W) | 100, 300 | Deposition time (min) | 30, 90 | Temperature | RT |
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