Research Article
Continuously Varying Thickness Interference Bandpass Filter for the Visible Spectral Range: Using Ion Beam Sputter Deposition
Table 6
Material thicknesses (Th.) of the quarter-wave bandpass filter design [
22].
| Layer no. | Material | Thickness (nm) |
| 1 | Nb2O5 | 10.4 | 2 | SiO2 | 238.6 | 3 | Nb2O5 | 33.8 | 4 | SiO2 | 84.6 | 5 | Nb2O5 | 24.1 | 6 | SiO2 | 64.7 | 7 | Nb2O5 | 43.5 | 8 | SiO2 | 87.5 | 9 | Nb2O5 | 41.9 | 10 | SiO2 | 53.4 | 11 | Nb2O5 | 34 | 12 | SiO2 | 83.4 | 13 | Nb2O5 | 45 | 14 | SiO2 | 81.2 | 15 | Nb2O5 | 33.5 | 16 | SiO2 | 60.6 | 17 | Nb2O5 | 40.3 | 18 | SiO2 | 84.2 | 19 | Nb2O5 | 36.4 | 20 | SiO2 | 70 | 21 | Nb2O5 | 128.6 | 22 | SiO2 | 95.9 | 23 | Nb2O5 | 62.7 | 24 | SiO2 | 147.8 | 25 | Nb2O5 | 80.1 | 26 | SiO2 | 97.2 | 27 | Nb2O5 | 67 | 28 | SiO2 | 149.6 | 29 | Nb2O5 | 69 | 30 | SiO2 | 101.5 | 31 | Nb2O5 | 76.3 | 32 | SiO2 | 142.6 | 33 | Nb2O5 | 65 | 34 | SiO2 | 105.6 | 35 | Nb2O5 | 83.7 | 36 | SiO2 | 129.2 | 37 | Nb2O5 | 71.9 | 38 | SiO2 | 116.4 | 39 | Nb2O5 | 99 | 40 | SiO2 | 137.7 | 41 | Nb2O5 | 112.3 | 42 | SiO2 | 114.2 | 43 | Nb2O5 | 89.1 | 44 | SiO2 | 141.9 | 45 | Nb2O5 | 70.3 | 46 | SiO2 | 191.3 | 47 | Nb2O5 | 116.3 | 48 | SiO2 | 155.2 | 49 | Nb2O5 | 49 | 50 | SiO2 | 179.3 | 51 | Nb2O5 | 65.1 | 52 | SiO2 | 185.4 | 53 | Nb2O5 | 89.3 | 54 | SiO2 | 165.6 | 55 | Nb2O5 | 57.6 | 56 | SiO2 | 149 | 57 | Nb2O5 | 97.4 | 58 | SiO2 | 191.8 | 59 | Nb2O5 | 103 | 60 | SiO2 | 142.2 | 61 | Nb2O5 | 118 | 62 | SiO2 | 180.4 | 63 | Nb2O5 | 94.1 | 64 | SiO2 | 188.5 | 65 | Nb2O5 | 122.5 | 66 | SiO2 | 148 | 67 | Nb2O5 | 116.6 | 68 | SiO2 | 197.9 | 69 | Nb2O5 | 99.2 | 70 | SiO2 | 140.1 | 71 | Nb2O5 | 103.2 | 72 | SiO2 | 196.7 | 73 | Nb2O5 | 95.1 | 74 | SiO2 | 165.5 | 75 | Nb2O5 | 150.7 | 76 | SiO2 | 199 | 77 | Nb2O5 | 125.1 | 78 | SiO2 | 143.7 | 79 | Nb2O5 | 109 |
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