Review on Surface Polishing Methods of Optical Parts

Figure 17

Development of processing device in EEM. (a) Cross spring-type EEM. (b) Robotic type EEM. (c) Structural schematic diagram of elastic constrained-free abrasive particle processing system. (d) Schematic drawing of the nozzle-type EEM system used in this study. (e) Double rotating wheel-type elastic launching processing device.