Review on Surface Polishing Methods of Optical Parts

Figure 6

PV of the original and compensated aspherical surface [25]. (a) Initial processing (PV = 7.77 μm; RMS = 1.35 μm). (b) First compensation processing (PV = 6.39 μm; RMS = 1.24 μm). (c) Second compensation processing (PV = 5.71 μm; RMS = 1.02 μm). (d) Third compensation processing (PV = 4.67 μm; RMS = 0.72 μm).

(a)

(b)

(c)

(d)