Review Article
Review on Surface Polishing Methods of Optical Parts
Table 1
1.2 μm particle size distribution range with different mass ratios and its corresponding workpiece surface roughness values after polishing.
| Granularity (μm) | Particle size distribution range (μm) | Particle volume concentration in 7 intervals near the average particle size | RMS (nm) |
| 1.2 | 0.254–4.755 | 6.33 | 6.99 | 7.46 | 7.70 | 0.1943 | 7.69 | 7.43 | 6.94 | — |
| Mass ratio of 1.2 μm to 1.6 μm is 3 : 1 | 0.22–13.063 | 6.36 | 6.89 | 7.23 | 7.36 | 0.2864 | 7.27 | 6.97 | 5.80 | — |
| Mass ratio of 1.2 μm to 1.6 μm is 1 : 1 | 0.05–15.989 | 6.07 | 6.45 | 6.67 | 6.72 | 0.1915 | 6.59 | 6.30 | 5.85 | — |
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