Review Article

Review on Surface Polishing Methods of Optical Parts

Table 1

1.2 μm particle size distribution range with different mass ratios and its corresponding workpiece surface roughness values after polishing.

Granularity (μm)Particle size distribution range (μm)Particle volume concentration in 7 intervals near the average particle sizeRMS (nm)

1.20.254–4.7556.336.997.467.700.1943
7.697.436.94

Mass ratio of 1.2 μm to 1.6 μm is 3 : 10.22–13.0636.366.897.237.360.2864
7.276.975.80

Mass ratio of 1.2 μm to 1.6 μm is 1 : 10.05–15.9896.076.456.676.720.1915
6.596.305.85