Microstructure, Mechanical, and Nanotribological Properties of Ni, Ni-TiN, and Ni90Cu10-TiN Films Processed by Reactive Magnetron Cosputtering

<div>(a–c) BF-TEM images of Ni, Ni-TiN, and Ni90Cu10-TiN, (d) DF-TEM image of Ni90Cu10-TiN, (e) high-resolution image of Ni90Cu10-TiN, and (f) SAED pattern of (e).</div>

Advances in Materials Science and Engineering

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Figure 3

Figure 3: Microstructure, Mechanical, and Nanotribological Properties of Ni, Ni-TiN, and Ni90Cu10-TiN Films Processed by Reactive Magnetron Cosputtering

Figure 3 | Microstructure, Mechanical, and Nanotribological Properties of Ni, Ni-TiN, and Ni90Cu10-TiN Films Processed by Reactive Magnetron Cosputtering 