Microstructure, Mechanical, and Nanotribological Properties of Ni, Ni-TiN, and Ni90Cu10-TiN Films Processed by Reactive Magnetron Cosputtering

<div>(a, b) Load—indentation curve and indentation image of Ni90Cu10-TiN, (c) ratio of Wp/Wt, and (d) hardness and elastic modulus of Ni, Ni-TiN, and Ni90Cu10-TiN thin films.</div>

Advances in Materials Science and Engineering

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Figure 4

Figure 4: Microstructure, Mechanical, and Nanotribological Properties of Ni, Ni-TiN, and Ni90Cu10-TiN Films Processed by Reactive Magnetron Cosputtering

Figure 4 | Microstructure, Mechanical, and Nanotribological Properties of Ni, Ni-TiN, and Ni90Cu10-TiN Films Processed by Reactive Magnetron Cosputtering 