Microstructure, Mechanical, and Nanotribological Properties of Ni, Ni-TiN, and Ni₉₀Cu₁₀-TiN Films Processed by Reactive Magnetron Cosputtering

Table 2

Crystallite size and RMS strain obtained for Ni, Ni-TiN, and Ni₉₀Cu₁₀-TiN thin films.

	RMS strain (×10^−3)	Grain size of Ni and Ni90Cu10 (nm)	Grain size of TiN (nm)
Ni	0.8 ± 0.2	19.3 ± 1.3	Not applicable
Ni-TiN	2.4 ± 0.2	13.4 ± 1.2	9.8 ± 1.1
Ni90Cu10-TiN	2.8 ± 0.3	13.1 ± 1.6	9.5 ± 1.2