Reactive Ion Etching (RIE) Induced Surface Roughness Precisely Monitored In-Situ and in Real Time by Reflectance Anisotropy Spectroscopy (RAS) in Combination with Principle Component Analysis (PCA)

Table 1

List of characteristic pillar/brush hair parameters for the four samples of “Brush Cut” morphology.

Sample	Etch time (min)	Height (nm)	Width (nm)	Aspect ratio	Average pillar distance (nm)
A	1	21	30.1	0.79	18.7
B	5	61	28.1	2.42	16.4
C	10	70	36.2	2.40	17.6
D	35	80	31.1	3.13	15.4