Analysis of Structural, Optical, and Aquaphobic Properties of Zirconium Oxide Nanofilms by Varying Sputtering Gas

<table class="table-group" id="tab1"><tr><td><table class="table"><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr class="thead"><td class="align_center" colspan="2">Setup environment under room temperature</td></tr><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr><td class="align_left">Base pressure</td><td class="align_center">5 × 10<sup>−6</sup> Torr</td></tr><tr><td class="align_left">Working pressure</td><td class="align_center">15 m Torr</td></tr><tr><td class="align_left">Ar gas flow</td><td class="align_center">40 sccm</td></tr><tr><td class="align_left">O<sub>2</sub>/Ar gas ratio range</td><td class="align_center">0.25–1.25</td></tr><tr><td class="align_left">Sputtering power</td><td class="align_center">60 W</td></tr><tr class="table-tr"><td colspan="2"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

<div>Environmental parameter for ZrO<sub>2</sub> films.</div>

Advances in Materials Science and Engineering

tab1

Table 1

Table 1: Analysis of Structural, Optical, and Aquaphobic Properties of Zirconium Oxide Nanofilms by Varying Sputtering Gas 