Analysis of Structural, Optical, and Aquaphobic Properties of Zirconium Oxide Nanofilms by Varying Sputtering Gas

Table 2

Elemental analysis of ZrO₂ in oxygen/argon gas atmosphere.

Oxygen/argon gas ratio	wt%Zr	wt%O	Grain size (nm)	Deposition rate (nm/min)
0.25	68.95	31.05	77.01	9.05
0.5	68.15	31.85	65.21	9.01
0.75	66.82	33.18	60.13	8.98
1.0	64.73	35.27	56.19	8.92
1.25	64.21	35.39	54.26	8.90