Analysis of Structural, Optical, and Aquaphobic Properties of Zirconium Oxide Nanofilms by Varying Sputtering Gas

Table 3

Parameters found for ZrO₂ films at various ratios of oxygen/argon.

Ratio	RI	Band gap	Film thickness (nm) measured
			Ocular data	Cross section of SEM	Surface profilometer
0.25	2.15	5.33	815	813	809
0.50	2.13	5.37	811	808	804
0.75	2.10	5.42	809	805	801
1.00	2.08	5.45	803	795	789
1.25	2.07	5.48	789	780	773