Electron Beam-Initiated Grafting of Methyl Methacrylate on Silicon Nanowires: Investigating Optical and Structural Properties

Table 2

Summarized microstructural and elastic parameters of the samples.

Grafting percentage (%)	Peak position	FWHM	Crystallite size, D (nm)	Microstrain, ɛ (10^−3)	Dislocation density, ε (10^−3)
Ungrafted	45.07	0.69	12.98	7.28	5.94
0.2	45.04	0.31	28.86	3.28	1.20
0.23	45.04	0.34	26.69	3.54	1.40
0.27	45.08	0.44	20.59	4.59	2.36
0.31	45.08	0.47	19.26	4.90	2.70
0.35	45.04	0.55	16.34	5.79	3.75