An Alternative Simulation Method for Calculation of Microgas Flows under Flying Head Sliders

Figure 5

Comparison of the mass flow rate obtained from global mass conservation, transitional flow, (30) (solid line), slip flow (dash-dot line), and continuum (dash-dot-dot line) with experimental data in a 0.53×40×4000𝜇m³ microchannel for helium [35] (symbols) at 𝐾𝑛_𝑜=0.3684.