Online-Offline Optimized Motion Profile for High-Dynamic Positioning of Ultraprecision Dual Stage

<table class="figure-group"><tr class="fig-image" id="a"><td><object data="https://static-preview.hindawi.com/articles/complexity/volume-2018/4948368/figures/4948368.fig.005a.svgz" name="4948368.fig.005a" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(a) </b>Flow chart of the optimization process</td></tr><tr class="fig-image" id="b"><td><object data="https://static-preview.hindawi.com/articles/complexity/volume-2018/4948368/figures/4948368.fig.005b.svgz" name="4948368.fig.005b" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(b) </b>The experimental platform</td></tr></table>

<div>Flow chart of the optimization process and the experimental platform.</div>

Complexity

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Figure 5

Figure 5: Online-Offline Optimized Motion Profile for High-Dynamic Positioning of Ultraprecision Dual Stage 