Online-Offline Optimized Motion Profile for High-Dynamic Positioning of Ultraprecision Dual Stage

<table class="figure-group"><tr class="fig-image" id="a"><td><object data="https://static-preview.hindawi.com/articles/complexity/volume-2018/4948368/figures/4948368.fig.006a.svgz" name="4948368.fig.006a" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(a) </b>Movement towards the positive direction by 30°</td></tr><tr class="fig-image" id="b"><td><object data="https://static-preview.hindawi.com/articles/complexity/volume-2018/4948368/figures/4948368.fig.006b.svgz" name="4948368.fig.006b" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(b) </b>Movement towards the negative direction by 25°</td></tr></table>

<div>Identified 6-order system simulation outputs and system actual outputs.</div>

Complexity

fig6

Figure 6

Figure 6: Online-Offline Optimized Motion Profile for High-Dynamic Positioning of Ultraprecision Dual Stage 