Online-Offline Optimized Motion Profile for High-Dynamic Positioning of Ultraprecision Dual Stage

<table class="figure-group"><tr class="fig-image" id="a"><td><object data="https://static-preview.hindawi.com/articles/complexity/volume-2018/4948368/figures/4948368.fig.009a.svgz" name="4948368.fig.009a" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(a) </b>System simulation output and actual output</td></tr><tr class="fig-image" id="b"><td><object data="https://static-preview.hindawi.com/articles/complexity/volume-2018/4948368/figures/4948368.fig.009b.svgz" name="4948368.fig.009b" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(b) </b>System actual tracking error</td></tr></table>

<div>Actual system output and the positioning error.</div>

Complexity

fig9

Figure 9

Figure 9: Online-Offline Optimized Motion Profile for High-Dynamic Positioning of Ultraprecision Dual Stage 