Online-Offline Optimized Motion Profile for High-Dynamic Positioning of Ultraprecision Dual Stage

Table 1

MSE between real outputs and identified systems outputs.

Den	1	2	3	4	5	6	7	8	9	10
Number
1	8.22	1.21e^−3	1.65e^−3	2.01	9.53e^−3	2.51	4.77e^−2	2.92e^3	2.03e^−1	2.74e^3
2	—	6.40e^−4	2.03e^−2	6.41e^−4	4.64e^−3	5.75e^−3	19.5	2.79e^−3	1.45e^−1	2.69e^3
3	—	—	3.35e^−2	6.11e^−4	3.21e^−4	4.16e^−4	5.04e^−2	55.6	3.37e^3	1.99e^3
4	—	—	—	2.34e^−4	4.05e^−4	4.01e^−3	4.21e^3	3.11e^−2	3.50e^3	3.40e^3
5	—	—	—	—	1.61e^−4	1.46e^−4	4.32e^−4	7.6e^−1	3.91e^3	3.33e^3
6	—	—	—	—	—	1.24e^−4	4.11e^3	6.41e^−2	4.04e^3	1.20e^3
7	—	—	—	—	—	—	3.59	2.20e^−2	4.27e^3	2.36
8	—	—	—	—	—	—	—	1.50e^3	4.11e^3	1.35e^−1
9	—	—	—	—	—	—	—	—	1.96e^−3	1.42e^−2
10	—	—	—	—	—	—	—	—	—	9.92e^−3