Model-Based ILC with a Modified <svg xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg" style="vertical-align:-2.838901pt" id="M1" height="14.2383pt" version="1.1" viewBox="-0.0657574 -11.3994 12.5675 14.2383" width="12.5675pt"><g transform="matrix(.017,0,0,-0.017,0,0)"><path id="g113-82" d="M699 368C699 549 574 666 407 666C186 666 23 488 23 277C23 113 129 -3 288 -13L307 -26C431 -111 501 -139 533 -147C559 -154 613 -163 658 -164L666 -141C597 -111 507 -66 430 -11L416 -1C580 42 699 190 699 368ZM601 371C601 227 518 54 381 22L354 40L278 24C175 47 120 145 120 269C120 451 235 631 398 631C540 631 601 521 601 371Z"/></g></svg>-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage

<table class="figure-group"><tr class="fig-image" id="a"><td><object data="https://static-preview.hindawi.com/articles/complexity/volume-2018/5406035/figures/5406035.fig.0010a.svgz" name="5406035.fig.0010a" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(a) </b>Tracking error</td></tr><tr class="fig-image" id="b"><td><object data="https://static-preview.hindawi.com/articles/complexity/volume-2018/5406035/figures/5406035.fig.0010b.svgz" name="5406035.fig.0010b" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(b) </b>Norm of the tracking error</td></tr></table>

<div>Convergence of the proposed algorithm under <span class="nowrap"><svg height="8.55521pt" id="M169" style="vertical-align:-0.2063904pt" version="1.1" viewbox="-0.0498162 -8.34882 34.9614 8.55521" width="34.9614pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M545 106L524 126C493 85 467 65 455 65C438 65 427 113 405 238C448 295 498 362 543 439L533 448L478 435C453 386 423 331 398 295H395C370 404 347 448 282 448C169 448 23 309 23 153C23 54 65 -12 128 -12C203 -12 283 70 339 155H341C360 29 380 -12 411 -12C444 -12 491 11 545 106ZM333 204C265 95 210 54 169 54C137 54 113 96 113 171C113 302 191 405 252 405C301 405 318 306 333 204Z" id="g113-223"></path></g><g transform="matrix(.013,0,0,-0.013,11.017,0)"><path d="M535 323V373H52V323H535ZM535 138V188H52V138H535Z" id="g117-34"></path></g><g transform="matrix(.013,0,0,-0.013,22.28,0)"><path d="M412 140C382 77 369 73 315 73H129L270 222C362 320 402 379 402 466C402 571 322 635 234 635C177 635 130 609 99 576L42 495L64 475C90 514 133 568 201 568C274 568 318 519 318 435C318 349 255 267 193 193C144 135 87 78 32 23V0H405C417 45 427 89 440 131L412 140Z" id="g113-51"></path></g><g transform="matrix(.013,0,0,-0.013,28.52,0)"><path d="M244 635C114 635 38 519 38 422C38 317 111 240 217 240C236 240 255 244 277 256L345 292C311 140 203 39 59 15L64 -15C89 -15 150 -5 204 17C339 72 440 202 440 386C440 521 368 635 244 635ZM228 602C326 602 352 479 352 390C352 370 351 347 348 324C327 308 293 296 258 296C174 296 124 369 124 458C124 517 152 602 228 602Z" id="g113-58"></path></g></svg>.</span></div>

Complexity

fig10

Figure 10

Figure 10: Model-Based ILC with a Modified <svg xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg" style="vertical-align:-2.838901pt" id="M1" height="14.2383pt" version="1.1" viewBox="-0.0657574 -11.3994 12.5675 14.2383" width="12.5675pt"><g transform="matrix(.017,0,0,-0.017,0,0)"><path id="g113-82" d="M699 368C699 549 574 666 407 666C186 666 23 488 23 277C23 113 129 -3 288 -13L307 -26C431 -111 501 -139 533 -147C559 -154 613 -163 658 -164L666 -141C597 -111 507 -66 430 -11L416 -1C580 42 699 190 699 368ZM601 371C601 227 518 54 381 22L354 40L278 24C175 47 120 145 120 269C120 451 235 631 398 631C540 631 601 521 601 371Z"/></g></svg>-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage 

Figure 10 | Model-Based ILC with a Modified -Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage 