A New Linear Motor Force Ripple Compensation Method Based on Inverse Model Iterative Learning and Robust Disturbance Observer

Table 4

The maximum tracking error using IMILC-RDOB.

	1	2	3	4	5
Error (μm)	1.40	1.10	0.75	0.65	0.50
	6	7	8	9	10
Error (μm)	0.50	0.40	0.35	0.40	0.30