Research Article

A New Linear Motor Force Ripple Compensation Method Based on Inverse Model Iterative Learning and Robust Disturbance Observer

Table 5

Performance in uniform velocity section of the three compensation methods.

MethodsIMILC-RDOBIMILCDOB
Indexes

Maximum tracking error (μm)0.300.456.75
MA (μm)0.02650.24823.2891
MSD (μm)0.14970.24933.1724
Settling time (ms)10.458.80.2