Research Article
Global Modeling of N2O Discharges: Rate Coefficients and Comparison with ICP and Glow Discharges Results
Table 11
Sensitivity of various PR parameters for a pressure of 5 mTorr, including the configuration available in the experiment [7].
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Values from [7] are included in first row(bold brackets)except for /. **Small peak at 40 sccm before decreasing. |