Research Article
Global Modeling of N2O Discharges: Rate Coefficients and Comparison with ICP and Glow Discharges Results
Table 3
Reactions involving nitrogen species considered in the N2O plasma kinetic system.
| No. | Process | Description | Rate | PoBE |
| Electron collisions (rates in cm3 s−1) | 1 | N2 + e− + 2e− | N2 ionization | | * | 2 | N2 + e−2N + e− | N2 dissociation | | * | 3 | N + e−N+ + 2e− | N ionization | | * | 4 | N2 () + e−N2 () + e− | N2 vib. exc. (0-1) | | * | 5 | N2 () + e−N2 () + e− | N2 vib. exc. (0–2) | | * | 6 | N2 () + e−N2 () + e− | N2 vib. exc. (0–3) | | * | 7 | N2 () + e−N2 () + e− | N2 vib. exc. (0–4) | | * | 8 | N2 () + e−N2 () + e− | N2 vib. exc. (0–5) | | * | 9 | N2 () + e−N2 () + e− | N2 vib. deexc. (1-0) | | | 10 | N2 () + e−N2 () + e− | N2 vib. deexc. (2–0) | | | 11 | N2 () + e−N2 () + e− | N2 vib. deexc. (3–0) | | | 12 | N2 () + e−N2 () + e− | N2 vib. deexc. (4–0) | | | 13 | N2 () + e−N2 () + e− | N2 vib. deexc. (5–0) | | | 14 | N2 () + e− + 2e− | N2 ionization from () | | | 15 | N2 () + e− + 2e− | N2 ionization from () | | | 16 | N2 () + e− + 2e− | N2 ionization from () | | | 17 | N2 () + e− + 2e− | N2 ionization from () | | | 18 | N2 () + e− + 2e− | N2 ionization from () | | | 19 | N2 () + e−2N + e− | N2 diss. from () | | | 20 | N2 () + e−2N + e− | N2 diss. from () | | | 21 | N2 () + e−2N + e− | N2 diss. from () | | | 22 | N2 () + e−2N + e− | N2 diss. from () | | | 23 | N2 () + e−2N + e− | N2 diss. from () | | |
| Reactions on the wall (rates in s−1) | 24 | N2 | recombination on the wall | | | 25 | N (1/2)N2 | N2 formation on the wall | | | 26 | N+ N | N+ recombination on the wall | | | 27 | N2 () N2 () | N2 () deexcitation on the wall | | |
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