Research Article
Global Modeling of N2O Discharges: Rate Coefficients and Comparison with ICP and Glow Discharges Results
Table 4
Reactions involving oxygen species considered in the N2O plasma kinetic system.
| No. | Process | Description | Rate | PoBE |
| Electron collisions: ionization (rates in cm3 s−1) | 1 | O2 + e− + 2e− | O2 ionization | | * | 2 | O(3P) + e−O+ + 2e− | O(3P) ionization | | * | 3 | O(1D) + e−O+ + 2e− | O(1D) ionization | | |
| Electron collisions: excitation and deexcitation (rates in cm3 s−1) | 4 | O(3P) + e−O(1D) + e− | O(1D) excitation | | * | 5 | O(1D) + e−O(3P) + e− | O(1D) deexcitation | | |
| Electronic dissociations and recombinations (rates in cm3 s−1) | 6 | O2 + e−2O(3P) + e− | O2 dissociation, diss. 1 | | * | 7 | O2 + e−O(3P) + O(1D)+ e− | O2 dissociation, diss. 1bis | | * | 8 | O2 + e−O− + O+ + e− | O2 dissociation, diss. 3 | | | 9 | O2 + e−O(3P) + O+ + 2e− | O2 dissociation, diss. 4 | | | 10 | O2 + e−O(3P) + O− | O2 dissociation, diss. 2 | | | 11 | O− + e−O(3P) + 2e− | O− recombination with e−, rec. 1 | | | 12 | + e−2O | dissociative recomb. | | |
| Heavy particle collision: deexcitation (rates in cm3 s−1) | 13 | O2 + O(1D)O2 + O(3P) | O(1D) deexcitation with O2 | | |
| Heavy particle collision: recombination (rates in cm3 s−1) | 14 | O− + O+2O(3P) | O− recombination with O+, rec. 2 | | | 15 | O− + O(3P) + O2 | O− recombination with , rec. 3 | | | 16 | O− + OO2 + e− | O− recombination with O, rec. 4 | | |
| Reactions on the wall (rates in s−1) | 17 | O2 | O2 recombination on the wall | | | 18 | O+ O(3P) | O recombination on the wall | | | 19 | O(1D) O(3P) | O(1D) deexcitation on the wall | | | 20 | O(3P) (1/2)O2 | O2 formation on the wall | | | 21 | O(1D) (1/2)O2 | O2 formation on the wall | | |
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